Share Email Print
cover

Proceedings Paper

Quantized structuring of transparent films with femtosecond laser interference
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500E; doi: 10.1117/12.2083489
Show Author Affiliations
Stephen Ho, Univ. of Toronto (Canada)
Kenneth K. C. Lee, Univ. of Toronto (Canada)
Jianzhao Li, Univ. of Toronto (Canada)
Peter R. Herman, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

© SPIE. Terms of Use
Back to Top