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Proceedings Paper

Lithography process of micropore array pattern in Si microchannel plates
Author(s): Linlin Fan; Jun Han; Huan Liu; Yawei Wang
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Paper Abstract

Microchannel plates(MCPs)are the key component of the image intensifier. Compared with the traditional MCPs, the Si MCPs which are fabricated by micro-nanofabrication technologies have a high gain, low noise and high resolution etc. In this paper, the lithography process is studied in the process of fabricating periodic micropore array with 10 um pores and 5 um pitch on Si. The effects of exposure time, reversal bake temperature and development time on the lithography quality are focused. By doing a series of experiments the better result is got: the photoresist film is obtained at a low speed 500/15(rpm/s) and a high speed 4500/50(rpm/s); the soft bake time is 10min at 100℃; the exposure time is 10s; the reversal bake time is 80s at 115℃; the development time is 55s. By microscope observation and measurement, the pattern is complete and the size of the pattern is accure, it meets the requirement of lithography process for fabricating Si-MCP.

Paper Details

Date Published: 19 February 2015
PDF: 6 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493R (19 February 2015); doi: 10.1117/12.2083180
Show Author Affiliations
Linlin Fan, Xi'an Univ. of Technology (China)
Science and Technology on Low-Light-Level Night Vision Lab. (China)
Jun Han, Xi'an Technological Univ. (China)
Huan Liu, Xi'an Technological Univ. (China)
Science and Technology on Low-Light-Level Night Vision Lab. (China)
Yawei Wang, North Huguang Optoelectronics Co., Ltd. (China)


Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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