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Proceedings Paper

Development of a rotary inchworm piezoelectric motor
Author(s): Khanh A. Duong; Ephrahim Garcia
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Paper Abstract

The development of a rotary inchworm-motor using piezoelectric actuators is presented. The motor design has the advantage of a macro and micro stepper motor with high torque and speed. The design is capable of fast angular positioning with micro level accuracy. The rotary motor, as designed, can also be used as a clutch/brake mechanism. A constructed prototype motor along with its characteristics are presented. The motor consists of a torsional section that provides angular displacement and torque, and two alternating clamping sections which provide the holding force. The motor relies on the principal piezoelectric coupling coefficient (d33) with no torsional piezoelectric elements used. The design eliminates bending moment and shear applied to the actuator elements, increasing its torque capability. An innovative flexure design has been introduced, and consideration has been given to contact elements which affect the performance of the motor; these issues are explored and discussed. Experiments are performed demonstrating a motor prototype based on the aforementioned design considerations.

Paper Details

Date Published: 8 May 1995
PDF: 7 pages
Proc. SPIE 2443, Smart Structures and Materials 1995: Smart Structures and Integrated Systems, (8 May 1995); doi: 10.1117/12.208315
Show Author Affiliations
Khanh A. Duong, Vanderbilt Univ. (United States)
Ephrahim Garcia, Vanderbilt Univ. (United States)

Published in SPIE Proceedings Vol. 2443:
Smart Structures and Materials 1995: Smart Structures and Integrated Systems
Inderjit Chopra, Editor(s)

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