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Proceedings Paper

Nanoscale precision in ion milling for optical and terahertz antennas
Author(s): G. Seniutinas; G. Gervinskas; A. Balčytis; F. Clark; Y. Nishijima; A. Krotkus; G. Molis; G. Valušis; S. Juodkazis
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Paper Abstract

Plasmonics and nanoscale antennas have been intensively investigated for sensors, metasurfaces and optical trapping where light control at the nanoscale enables new functionalities. To confine and manipulate the light in tiny spaces sub-wavelength antennas should be used with dimensions from micro- to nano-meters and are still challenging to make. Direct fabrication/modification of nanostructures using focused ion beam (FIB) milling is demonstrated for several types of antennas. Arrays of identical nanoparticles were fabricated in a single step by (i) milling gold films or (ii) by modifying structures which were already defined by electron beam or mask projection lithography. Direct FIB writing enables to exclude resist processing steps, thus making fabrication faster and simpler. Sensor areas of 25x25 μm2 of densely packed nanoparticles separated by tens-of-nanometers were fabricated in half an hour (103 μm2/h throughput at 90 nm resolution). Patterns of chiral nanoparticles by groove inscription is demonstrated. The processing speed and capability to mill complex 3D surfaces due to depth of focus not compromised over micrometers length, makes it possible to reach sub-50 nm resolution of direct write. FIB technology is practical for emerging applications in nano-fabrication/photonic/fluidic/magnetic applications.

Paper Details

Date Published: 13 March 2015
PDF: 8 pages
Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 93740P (13 March 2015); doi: 10.1117/12.2082344
Show Author Affiliations
G. Seniutinas, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)
G. Gervinskas, Swinburne Univ of Technology (Australia)
Australian National Fabrication Facility (Australia)
A. Balčytis, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)
Ctr. for Physical Sciences and Technology (Lithuania)
F. Clark, Swinburne Univ. of Technology (Australia)
Y. Nishijima, Yokohama National Univ. (Japan)
A. Krotkus, Ctr. for Physical Sciences and Technology (Lithuania)
G. Molis, Teravil Ltd. (Lithuania)
G. Valušis, Ctr. for Physical Sciences and Technology (Lithuania)
S. Juodkazis, Swinburne Univ. of Technology (Australia)
Australian National Fabrication Facility (Australia)


Published in SPIE Proceedings Vol. 9374:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf; Henry Helvajian, Editor(s)

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