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Proceedings Paper

Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders
Author(s): Veljko Milanović; Abhishek Kasturi; Bryan Atwood; Yu Su; Kevin Limkrailassiri; John E. Nettleton; Lew Goldberg; Brian J. Cole; Nathaniel Hough
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Paper Abstract

A highly compact and low power consuming Q-switch module was developed based on a fast single-axis MEMS mirror, for use in eye-safe battery-powered laser range finders The module’s 1.6mm x 1.6mm mirror has <99% reflectance at 1535nm wavelength and can achieve mechanical angle slew rates of over 500 rad/sec when switching the Er/Yb:Glass lasing cavity from pumping to lasing state. The design targeted higher efficiency, smaller size, and lower cost than the traditional Electro-Optical Q-Switch. Because pulse-on-demand capability is required, resonant mirrors cannot be used to achieve the needed performance. Instead, a fast point-to-point analog single-axis tilt actuator was designed with a custom-coated high reflectance (HR) mirror to withstand the high intra-cavity laser fluence levels. The mirror is bonded on top of the MEMS actuator in final assembly. A compact MEMS controller was further implemented with the capability of autonomous on-demand operation based on user-provided digital trigger. The controller is designed to receive an external 3V power supply and a digital trigger and it consumes ~90mW during the short switching cycle and ~10mW in standby mode. Module prototypes were tested in a laser cavity and demonstrated high quality laser pulses with duration of ~20ns and energy of over 3mJ.

Paper Details

Date Published: 27 February 2015
PDF: 7 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750H (27 February 2015); doi: 10.1117/12.2082212
Show Author Affiliations
Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
Abhishek Kasturi, Mirrorcle Technologies, Inc. (United States)
Bryan Atwood, Mirrorcle Technologies, Inc. (United States)
Yu Su, Mirrorcle Technologies, Inc. (United States)
Kevin Limkrailassiri, Mirrorcle Technologies, Inc. (United States)
John E. Nettleton, U.S. Army RDECOM CERDEC NVESD (United States)
Lew Goldberg, U.S. Army RDECOM CERDEC NVESD (United States)
Brian J. Cole, U.S. Army RDECOM CERDEC NVESD (United States)
Nathaniel Hough, Fibertek, Inc. (United States)


Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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