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Proceedings Paper

An optical fiber multiplexing interferometric system for measuring remote and high precision step height
Author(s): Yunzhi Wang; Fang Xie; Sen Ma; Liang Chen
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Paper Abstract

In this paper, an optical fiber multiplexing interferometric system including a Fizeau interferometer and a Michelson interferometer is designed for remote and high precision step height measurement. The Fizeau interferometer which is inserted in the remote sensing field is used for sensing the measurand, while the Michelson interferometer which is stabilized by a feedback loop works in both modes of low coherence interferometry and high coherence interferometry to demodulate the measurand. The range of the step height is determined by the low coherence interferometry and the value of it is measured precisely by the high coherence interferometry. High precision has been obtained by using the symmetrical peak-searching method to address the peak of the low coherence interferogram precisely and stabilizing the Michelson interferometer with a feedback loop. The maximum step height that could be measured is 6 mm while the measurement resolution is less than 1 nm. The standard deviation of 10 times measurement results of a step height of 1 mm configurated with two gauge blocks is 0.5 nm.

Paper Details

Date Published: 19 February 2015
PDF: 14 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 944938 (19 February 2015); doi: 10.1117/12.2081972
Show Author Affiliations
Yunzhi Wang, Beijing Jiaotong Univ. (China)
Fang Xie, Beijing Jiaotong Univ. (China)
Sen Ma, Beijing Jiaotong Univ. (China)
Liang Chen, Beijing Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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