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Proceedings Paper

Design and manufacturing of scanning probe acoustic microscope test phantom
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Paper Abstract

Acquiring nondestructive internal structures acoustic image as well as the morphology images using scanning probe acoustic microscope (SPAM) is a challenge and no known metrology tools to identify the ultrasonic internal resolution and detectable depth of SPAM in a nondestructive way. Monitoring these defects necessitates the identification of their technical parameters of SPAM. In this paper, the specific materials (test phantoms) were designed and processed so that the ultrasound internal resolution of SPAM in nondestructive imaging of the embedded or buried substructures as well as the morphology images were measured. Experimental results demonstrated the successful identification of embedded or buried defects under the test phantom with the resolution of 50nm for SPAM as well as the detectable depth of more than 100μm.

Paper Details

Date Published: 17 March 2015
PDF: 8 pages
Proc. SPIE 9419, Medical Imaging 2015: Ultrasonic Imaging and Tomography, 94190A (17 March 2015); doi: 10.1117/12.2081843
Show Author Affiliations
Xiaohui Chen, Huazhong Univ. of Science and Technology (China)
Xiaoyue Fang, Huazhong Univ. of Science and Technology (China)
Jitao Song, Huazhong Univ. of Science and Technology (China)
Mingyue Ding, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9419:
Medical Imaging 2015: Ultrasonic Imaging and Tomography
Johan G. Bosch; Neb Duric, Editor(s)

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