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Proceedings Paper

White light interferometer with color CCD for 3D-surface profiling of microsystems
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Paper Abstract

White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples.

Paper Details

Date Published: 4 March 2015
PDF: 6 pages
Proc. SPIE 9302, International Conference on Experimental Mechanics 2014, 93023R (4 March 2015); doi: 10.1117/12.2081117
Show Author Affiliations
Paul Kumar Upputuri, Nanyang Technological Univ. (Singapore)
Manojit Pramanik, Nanyang Technological Univ. (Singapore)
Krishna Mohan Nandigana, Indian Institute of Technology Madras (India)
Mahendra Prasad Kothiyal, Indian Institute of Technology Madras (India)


Published in SPIE Proceedings Vol. 9302:
International Conference on Experimental Mechanics 2014
Chenggen Quan; Kemao Qian; Anand Asundi; Fook Siong Chau, Editor(s)

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