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Proceedings Paper

Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material
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Paper Abstract

We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures.

Paper Details

Date Published: 17 April 2015
PDF: 6 pages
Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 937415 (17 April 2015); doi: 10.1117/12.2080425
Show Author Affiliations
Chris Summitt, College of Optical Sciences, The Univ. of Arizona (United States)
Sunglin Wang, College of Optical Sciences, The Univ. of Arizona (United States)
Lee Johnson, College of Optical Sciences, The Univ. of Arizona (United States)
Melissa Zaverton, College of Optical Sciences, The Univ. of Arizona (United States)
Tao Ge, College of Optical Sciences, The Univ. of Arizona (United States)
Tom Milster, College of Optical Sciences, The Univ. of Arizona (United States)
Yuzuru Takashima, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 9374:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf; Henry Helvajian, Editor(s)

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