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Proceedings Paper

A light-activated optopiezoelectric thin-film actuator for microfluidic applications
Author(s): Hsin-Hu Wang; Ting-Jui Wu; Cheng-Che Hsu; Chih-Kung Lee; Yu-Hsiang Hsu
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Paper Abstract

In this paper, we present a new type of piezoelectric composite material, optopiezoelectric thin-film, to serve as a lightactivated micropump for integrating with a microfluidic device. By using a photoconductive material (titanium oxide phthalocyanine) to serve as one of the electrodes of a piezoelectric polyvinylidene fluoride (PVDF) polymer, multiple locations of this optopiezoelectric thin-film can be actuated independently with one driving voltage source and a programmable light mask. Integrating this optopiezoelectric thin-film to a microfluidic device, complex operations of a multi-functioned microfluidic device can potentially be simplified and scaled up. Here, we present our preliminary result to demonstrate the feasibility of using one optopiezoelectric thin-film to serve as two microfluidic micropumps controlled by a light mask.

Paper Details

Date Published: 5 March 2015
PDF: 5 pages
Proc. SPIE 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII, 93200D (5 March 2015); doi: 10.1117/12.2079873
Show Author Affiliations
Hsin-Hu Wang, National Taiwan Univ. (Taiwan)
Ting-Jui Wu, National Taiwan Univ. (Taiwan)
Cheng-Che Hsu, National Taiwan Univ. (Taiwan)
Chih-Kung Lee, National Taiwan Univ. (Taiwan)
Yu-Hsiang Hsu, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 9320:
Microfluidics, BioMEMS, and Medical Microsystems XIII
Bonnie L. Gray; Holger Becker, Editor(s)

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