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Proceedings Paper

Direct laser beam interference patterning technique for fast high aspect ratio surface structuring
Author(s): Simonas Indrisiunas; Bogdan Voisiat; Airidas Žukauskas; Gediminas Račiukaitis
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Paper Abstract

New results on development of the Direct Laser Interference Patterning (DLIP) technique using the interference of several beams to directly ablate the material are presented. The method is capable of producing sub-wavelength features not limited by a beam spot size and is an effective method of forming two-dimensional periodic structures on relatively large area with just a single laser shot. Surface texturing speed of DLIP method and the direct laser writing was compared. Fabrication time reduction up to a few orders of magnitude using DLIP was evaluated. The sub-period scanning technique was applied for formation of the complex periodic structures. A new method of laser scanning for fabrication of periodic structures on large areas without any visible stitching signs between laser irradiation spots was tested.

Paper Details

Date Published: 4 March 2015
PDF: 7 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935003 (4 March 2015); doi: 10.1117/12.2079826
Show Author Affiliations
Simonas Indrisiunas, Ctr. for Physical Sciences and Technology (Lithuania)
Bogdan Voisiat, Ctr. for Physical Sciences and Technology (Lithuania)
Airidas Žukauskas, Ctr. for Physical Sciences and Technology (Lithuania)
Gediminas Račiukaitis, Ctr. for Physical Sciences and Technology (Lithuania)


Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

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