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Proceedings Paper

Total internal reflection mirrors with ultra-low losses in 3 µm thick SOI waveguides
Author(s): Timo Aalto; Mikko Harjanne; Sami Ylinen; Markku Kapulainen; Tapani Vehmas; Matteo Cherchi
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Paper Abstract

Total internal reflection (TIR) mirrors represent an ultra-compact and flexible method to turn light in a photonic integrated circuit (PIC). These can also have very broadband and polarisation independent operation. This paper presents results from 90 degree strip waveguide turning mirrors with novel geometry on a 3 μm SOI waveguide platform. The new TIR mirrors have record-low insertion loss of 0.08 dB/mirror. They are compared with previous designs that have demonstrated insertion losses down to 0.15 dB/mirror. The test structures consisted of up to 96 consecutive mirrors and were fabricated in a multi-project wafer run. The multi-moded test devices only propagate light in the fundamental mode. The mirrors can be used in single-mode PICs that combine low losses, small polarisation dependency, wide bandwidth and small footprint.

Paper Details

Date Published: 27 February 2015
PDF: 9 pages
Proc. SPIE 9367, Silicon Photonics X, 93670B (27 February 2015); doi: 10.1117/12.2079748
Show Author Affiliations
Timo Aalto, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Mikko Harjanne, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Sami Ylinen, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Markku Kapulainen, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Tapani Vehmas, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Matteo Cherchi, VTT Technical Research Ctr. of Finland Ltd. (Finland)


Published in SPIE Proceedings Vol. 9367:
Silicon Photonics X
Graham T. Reed; Michael R. Watts, Editor(s)

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