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Proceedings Paper

Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications
Author(s): M. Schürmann; S. Risse; H. Kämmer; C. Franke; R. Schlegel; S. Müller; C. Damm; R. Steinkopf; F. Dreisow; S. Nolte; R. Eberhardt; N. Kaiser
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Paper Abstract

Metal mirrors are an attractive solution for scan mirrors working with ultra-short pulse lasers. Small mechanical inertia and a small mirror mass are required. Therefore, the mirrors have to be very stiff and a high quality optical surface has to be provided. This can be achieved with lightweight AlSi based mirrors with diamond-turned NiP polishable plating.

Different coating options were evaluated in order to provide the necessary high reflectivity and a satisfactory laser damage threshold for ultrashort laser pulses in the few ps to fs regime at λ = 1030 nm. High-reflective metal layers enhanced by dielectric HfO2/SiO2 stacks were found to be the most advantageous coating option due to their comparatively small thickness and measured damage thresholds above 1 J/cm2@8ps.

Paper Details

Date Published: 12 March 2015
PDF: 11 pages
Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93510S (12 March 2015); doi: 10.1117/12.2079487
Show Author Affiliations
M. Schürmann, Fraunhofer IOF (Germany)
S. Risse, Fraunhofer IOF (Germany)
H. Kämmer, Friedrich-Schiller-Univ. Jena (Germany)
C. Franke, Fraunhofer IOF (Germany)
R. Schlegel, Fraunhofer IOF (Germany)
S. Müller, Fraunhofer IOF (Germany)
C. Damm, Fraunhofer IOF (Germany)
R. Steinkopf, Fraunhofer IOF (Germany)
F. Dreisow, Friedrich-Schiller-Univ. Jena (Germany)
S. Nolte, Friedrich-Schiller-Univ. Jena (Germany)
R. Eberhardt, Fraunhofer IOF (Germany)
N. Kaiser, Fraunhofer IOF (Germany)

Published in SPIE Proceedings Vol. 9351:
Laser-based Micro- and Nanoprocessing IX
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)

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