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Proceedings Paper

Suspended silicon slotted microring resonators with ultra-high optical quality
Author(s): Wei C. Jiang; Qiang Lin
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Paper Abstract

We propose and demonstrate a unique suspended slot-waveguide structure supported by a thin slab to realize high-quality air-clad silicon slotted microring resonators (SMRs) on the silicon-on-insulator platform, based on a fabrication process consisting of two-step electron beam lithography and inductively-coupled-plasma reactive-ion- etching. Our SMRs can achieve an intrinsic optical quality factor (Q) above 105 operating at the telecom band, which is the highest value for silicon SMRs reported to date. The demonstrated high-quality air-clad silicon SMRs enable great potential for broad applications in biosensing, nonlinear photonics, and cavity optomechanics.

Paper Details

Date Published: 27 February 2015
PDF: 6 pages
Proc. SPIE 9367, Silicon Photonics X, 936708 (27 February 2015); doi: 10.1117/12.2079307
Show Author Affiliations
Wei C. Jiang, Univ. of Rochester (United States)
Qiang Lin, Univ. of Rochester (United States)


Published in SPIE Proceedings Vol. 9367:
Silicon Photonics X
Graham T. Reed; Michael R. Watts, Editor(s)

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