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Proceedings Paper

A novel reciprocating micropump based on Lorentz force
Author(s): Alinaghi Salari; Abbas Hakimsima; Mohammad Behshad Shafii
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Paper Abstract

Lorentz force is the pumping basis of many electromagnetic micropumps used in lab-on-a-chip. In this paper a novel reciprocating single-chamber micropump is proposed, in which the actuation technique is based on Lorentz force acting on an array of microwires attached on a membrane surface. An alternating current is applied through the microwires in the presence of a magnetic field. The resultant force causes the membrane to oscillate and pushes the fluid to flow through microchannel using a ball-valve. The pump chamber (3 mm depth) was fabricated on a Polymethylmethacrylate (PMMA) substrate using laser engraving technique. The chamber was covered by a 60 μm thick hyper-elastic latex rubber diaphragm. Two miniature permanent magnets capable of providing magnetic field of 0.09 T at the center of the diaphragm were mounted on each side of the chamber. Square wave electric current with low-frequencies was generated using a function generator. Cylindrical copper microwires (250 μm diameter and 5 mm length) were attached side-by-side on top surface of the diaphragm. Thin loosely attached wires were used as connectors to energize the electrodes. Due to large displacement length of the diaphragm (~3 mm) a high efficiency (~90%) ball valve (2 mm diameter stainless steel ball in a tapered tubing structure) was used in the pump outlet. The micropump exhibits a flow rate as high as 490 μl/s and pressure up to 1.5 kPa showing that the pump is categorized among high-flow-rate mechanical micropumps.

Paper Details

Date Published: 5 March 2015
PDF: 7 pages
Proc. SPIE 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII, 93200C (5 March 2015); doi: 10.1117/12.2078611
Show Author Affiliations
Alinaghi Salari, Sharif Univ. of Technology (Iran, Islamic Republic of)
Abbas Hakimsima, Sharif Energy Research Institute (Iran, Islamic Republic of)
Mohammad Behshad Shafii, Sharif Univ. of Technology (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 9320:
Microfluidics, BioMEMS, and Medical Microsystems XIII
Bonnie L. Gray; Holger Becker, Editor(s)

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