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Proceedings Paper

Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth
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Paper Abstract

Notch filters based on fiber-coupled Fabry-Pérot cavity are formed by a reflector placed in close proximity to a dielectric-coated end of an optical fiber. This kind of optical filters is easy to tailor for a given application because the external mirror has less mechanical and optical constraints. In this paper we present a fiber-coupled Fabry-Pérot filter based on dielectric-coated optical fiber inserted into a fiber groove facing a metallized micromirror, where the latter is driven by a high-speed MEMS actuator. The microsystem is fabricated using Deep Reactive Ion Etching (DRIE) technology on SOI wafer. The optical axis is in-plane and the components are self-aligned. The DRIE etching depth is 150 μm; chosen for improving the out-of-plane stiffness of the actuator and increasing the micromirror optical throughput. The MEMS actuator type is closing-gap while its quality factor is improved by slotting the fixed plate. The actuator, therefore, achieves a travel distance larger than 800 nm and has a resonance frequency of 90 kHz. The notch filter exhibits a free spectral range up to 100 nm and a notch rejection ratio of 20 dB around a wavelength of 1300 nm. The presented device provides low cost wafer level production of the filter.

Paper Details

Date Published: 27 February 2015
PDF: 6 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750U (27 February 2015); doi: 10.1117/12.2078155
Show Author Affiliations
Yasser M. Sabry, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Yomna M. Eltagoury, Ain Shams Univ. (Egypt)
Ahmed Shebl, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Mostafa Soliman, Si-Ware Systems (Egypt)
Electronic Research Institute (Egypt)
Diaa Khalil, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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