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Proceedings Paper

Structural characterization of low defect density III-Nitrides semipolar films and heterostructures by transmission electron microscopy
Author(s): Philippe Vennéguès; Florian Tendille; Michel Khoury; Jesus Zuniga-Perez; lars Kappei; Julien Brault; Maxim Korytov; Nikolay Cherkashin; Guy Feuillet; Philippe De Mierry
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Paper Details

Date Published:
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Proc. SPIE 9363, Gallium Nitride Materials and Devices X, 93630N; doi: 10.1117/12.2077609
Show Author Affiliations
Philippe Vennéguès, Ctr. de Recherche sur l'Hétéro-Epitaxie et ses Applications (France)
Florian Tendille, Ctr. National de la Recherche Scientifique (France)
Michel Khoury, Ctr. National de la Recherche Scientifique (France)
CEA-LETI (France)
Jesus Zuniga-Perez, Ctr. National de la Recherche Scientifique (France)
lars Kappei, Ctr. National de la Recherche Scientifique (France)
Julien Brault, Ctr. National de la Recherche Scientifique (France)
Maxim Korytov, Ctr. d'Elaboration de Matériaux et d'Etudes Structurales (France)
Nikolay Cherkashin, Ctr. d'Elaboration de Matériaux et d'Etudes Structurales (France)
Guy Feuillet, CEA-LETI (France)
CRHEA (France)
Philippe De Mierry, Ctr. de Recherche sur l'Hétéro-Epitaxie et ses Applications (France)


Published in SPIE Proceedings Vol. 9363:
Gallium Nitride Materials and Devices X
Jen-Inn Chyi; Hiroshi Fujioka; Hadis Morkoç, Editor(s)

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