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Proceedings Paper

High-resolution printing of functional microdots by double-pulse laser-induced forward transfer
Author(s): Aiko Narazaki; Ryozo Kurosaki; Tadatake Sato; Hiroyuki Niino
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Paper Abstract

For high-resolution printing, we have developed a novel way of functional microdots deposition based on laser-induced forward transfer, which is referred to laser-induced dot transfer (LIDT). LIDT is one of promising additive manufacturing techniques because it can realize flexible patterning of micron and submicron-sized dots at atmospheric room-temperature conditions. Recently we have achieved printing of functional oxide microdots by a double-pulse LIDT with the first pulse for preheat and the second pulse for transfer, resulting in more precise control of laser-induced hightemperature and thermal-stress in a source film. In this paper, temporal temperature distributions during the transfer process have been investigated using a finite element method approach. High-resolution printing of functional microdots is promising for future optoelectronic integrations.

Paper Details

Date Published: 4 March 2015
PDF: 8 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500I (4 March 2015); doi: 10.1117/12.2077527
Show Author Affiliations
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Ryozo Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

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