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Proceedings Paper

Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement
Author(s): M. Zimmermann; B. Jaeggi; B. Neuenschwander
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Paper Abstract

In earlier work the capabilities of synchronizing a galvo scanner or a polygon line scanner with a picosecond laser system in MOPA arrangement were presented. However these systems only enabled precise positioning of laser pulses on the target relatively to each other. Since then a novel approach to increase the absolute precision in positioning has been developed. This improvement enables new and more efficient process strategies such as bidirectional processing or high precision structuring of large areas in combination with additional mechanical axes. These improvements represent a major step towards large scale industrial applications in laser based micromachining.

Paper Details

Date Published: 4 March 2015
PDF: 8 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935016 (4 March 2015); doi: 10.1117/12.2076724
Show Author Affiliations
M. Zimmermann, Bern Univ. of Applied Sciences (Switzerland)
B. Jaeggi, Bern Univ. of Applied Sciences (Switzerland)
B. Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)


Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

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