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Proceedings Paper

Effect of different properties of Cu(In1-xGax)Se2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition
Author(s): Mu-Gong Tsai; Chia-Chuan Chen; You-jyun Chen; In-Gann Chen; Xiaoding Qi; Jung-Chun C. A. Huang; Cen-Ying Lin; Chung-Wei Cheng
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Paper Abstract

Two kinds of pulsed laser sources, femtosecond laser (fs laser) and nanosecond laser (ns laser), were used in the pulsed laser deposition (PLD) system to synthesize copper indium gallium selenium (CIGS) thin films at the substrate temperature from room temperature (RT) and 500o C. Different surface morphology, crystallinity, and stoichiometric ratio were observed on CIGS thin films deposited by femtosecond pulsed laser deposition (fs-PLD) and nanosecond pulsed laser deposition (ns-PLD) respectively, that resulted in different optical and electrical properties. It is proposed that the laser absorption of CIGS target with different laser wavelength caused the difference in laser penetration depths into the target, so that the stoichiometric ratio of the evaporated materials splashing from the target were different between fs-PLD and ns-PLD processes.

Paper Details

Date Published: 4 March 2015
PDF: 7 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935019 (4 March 2015); doi: 10.1117/12.2076554
Show Author Affiliations
Mu-Gong Tsai, National Cheng Kung Univ. (Taiwan)
Chia-Chuan Chen, National Cheng Kung Univ. (Taiwan)
You-jyun Chen, National Cheng Kung Univ. (Taiwan)
In-Gann Chen, National Cheng Kung Univ. (Taiwan)
Xiaoding Qi, National Cheng Kung Univ. (Taiwan)
Jung-Chun C. A. Huang, National Cheng Kung Univ. (Taiwan)
Cen-Ying Lin, Industrial Technology Research Institute (Taiwan)
Chung-Wei Cheng, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

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