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Proceedings Paper

Using polygon patterning to generate tapered shape in automated TEM preparation on a pre-thinned chunk
Author(s): Ying Liu; Rick Kontra; Craig Henry; Trevan Landin
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Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, ; doi: 10.1117/12.2076307
Show Author Affiliations
Ying Liu, FEI Co. (United States)
Rick Kontra, IBM WWAS TEM Laboratory (United States)
Craig Henry, FEI Co. (United States)
Trevan Landin, FEI Co. (United States)


Published in SPIE Proceedings Vol. 9374:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf; Henry Helvajian, Editor(s)

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