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Proceedings Paper

Towards high precision manufacturing of 3D optical components using UV-curable hybrid polymers
Author(s): A. Schleunitz; J. J. Klein; R. Houbertz; M. Vogler; G. Gruetzner
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Paper Abstract

Hybrid polymers have been already widely applied in photonic applications to manufacture microlenses or 2D and 3D waveguides. Thus, they are promising candidates to manufacture optical systems down to the chip level. A brief review on hybrid polymers consisting of both inorganic and organic functional units and thus combine superior material properties in just one material class will be given in this report. The material properties, which can be adjusted to the application in wide ranges enable to fabricate micro-optical elements (e.g. microlenses) using replication techniques such as UV-assisted replication or nano-imprint lithography. Aside of their applicability in 2D, emphasis will be in particular on the evaluation of hybrid polymer materials for two-photon absorption lithography, which is employed to directly manufacture sophisticated 3D photonic structures impossible to be generated with conventional 2D techniques.

Paper Details

Date Published: 3 April 2015
PDF: 9 pages
Proc. SPIE 9368, Optical Interconnects XV, 93680E (3 April 2015); doi: 10.1117/12.2076252
Show Author Affiliations
A. Schleunitz, micro resist technology GmbH (Germany)
J. J. Klein, micro resist technology GmbH (Germany)
R. Houbertz, Multiphoton Optics GmbH (Germany)
M. Vogler, micro resist technology GmbH (Germany)
G. Gruetzner, micro resist technology GmbH (Germany)


Published in SPIE Proceedings Vol. 9368:
Optical Interconnects XV
Henning Schröder; Ray T. Chen, Editor(s)

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