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Proceedings Paper

Experimental research of error restraint for dynamic interferometer in optical testing
Author(s): Xin Wu; Xiaoqiang Zhang; Xiaoyan Wu; Linna Zhang; Yingjie Yu
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Paper Abstract

Phase shifting interferometry is commonly used in precision optical surface measurement, but which possesses some limitation because of the sensitivity to environment. Therefore, it is hardly used in optical testing in the workshop environment. Thus, the instantaneous interferometry is a good choice because of the insensitive to vibration. This paper will describe an instantaneous interferometry utilizing spatial carrier and Fourier transform, and discuss the accuracy of the interferometer for optical testing when phase-shifting interferometry is unable to realize the precision measurement. With a lot of experiments, some problems were analyzed, including the relationships between the measurement accuracy and systematic error, vibration, temperature, the test surface cleanliness and so on. The discussed work of error restraint can provide a reference for the instantaneous interferometry applications.

Paper Details

Date Published: 19 February 2015
PDF: 8 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94492V (19 February 2015); doi: 10.1117/12.2075866
Show Author Affiliations
Xin Wu, Shanghai Univ. (China)
Xiaoqiang Zhang, Shanghai Univ. (China)
Xiaoyan Wu, Shanghai Univ. (China)
Linna Zhang, Shanghai Univ. (China)
Zhengzhou Univ. (China)
Yingjie Yu, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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