Share Email Print
cover

Proceedings Paper

On accuracy of holographic shape measurement method with spherical wave illumination
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper presents the study on the accuracy of topography measurement of high numerical aperture focusing microobjects in digital holographic microscope setup. The system works in reflective configuration with spherical wave illumination. For numerical reconstruction of topography of high NA focusing microobjects we are using two algorithms: Thin Element Approximation (TEA) and Spherical Local Ray Approximation (SLRA). In this paper we show comparison of the accuracy of topography reconstruction results using these algorithms. We show superiority of SLRA method. However, to obtain accurate results two experimental conditions have to be determined: the position of point source (PS) and imaging reference plane (IRP).Therefore we simulate the effect of point source (PS) and imaging reference plane (IRP) position on the accuracy of shape calculation. Moreover we evaluate accuracy of determination of location of PS and IRP and finally present measurement result of microlens object.

Paper Details

Date Published: 16 December 2014
PDF: 9 pages
Proc. SPIE 9290, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2014, 92900P (16 December 2014); doi: 10.1117/12.2075807
Show Author Affiliations
Marta Mikuła, Warsaw Univ. of Technology (Poland)
Tomasz Kozacki, Warsaw Univ. of Technology (Poland)
Julianna Kostencka, Warsaw Univ. of Technology (Poland)
Kamil Liżewski, Warsaw Univ. of Technology (Poland)
Michał Józwik, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 9290:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2014
Ryszard S. Romaniuk, Editor(s)

© SPIE. Terms of Use
Back to Top