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Proceedings Paper

Precision issues in angle measurements by means of autocollimator
Author(s): Yuri V. Filatov; Roman A Larichev
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Paper Abstract

Ambiguity in plane angle definition is considered. Autocollimator performance is regarded from geometric ray optics and wave diffraction optics points of view. Few typical aberrations and their influence on image formation in autocollimator are presented. Modeling estimates of aberration influence on angle measurements are outlined.

Paper Details

Date Published: 13 November 2014
PDF: 6 pages
Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927626 (13 November 2014); doi: 10.1117/12.2075598
Show Author Affiliations
Yuri V. Filatov, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Roman A Larichev, Saint Petersburg Electrotechnical Univ. "LETI" (Russian Federation)


Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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