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Proceedings Paper

High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation
Author(s): Chun-Lin Chang; Yen-Yin Li; Po-Yen Lai; Yi-Ping Lai; Chien-Wei Huang; Shih-Hung Chen; Sheng-Lung L. Huang
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Paper Abstract

High-efficiency fiber-based extreme ultraviolet driver in the alignment-free configuration has been experimentally achieved with a maximum intensity of 6.4×1010 W/cm2 on target at a repetition rate of 20 kHz. The output EUV signal within 10~20 nm in wavelength was confirmed with a Si/Zr-coated x-ray photodiode by varying numbers of Be and Al foil filters. The measured spectral range is consistent with that obtained by the weighted oscillator strengths of Sn8+ to Sn+13 ions using an one-dimensional hydrodynamic code coupled with the ionization model of collisional-radiative equilibrium. The driver is based on a 1064-nm nanosecond coiled ytterbium all-fiber laser system in diode-seeded master oscillator power amplification. With an overall optical efficiency up to 56%, it can deliver a 1.16-mJ, 117-kW, 6.1-ns laser pulses with a FWHM linewidth of 10 nm and beam propagation factor of M2~1.55. The full advantages of using fiber laser for a movable LPP EUV metrology source are revealed.

Paper Details

Date Published: 4 March 2015
PDF: 10 pages
Proc. SPIE 9344, Fiber Lasers XII: Technology, Systems, and Applications, 93440C (4 March 2015); doi: 10.1117/12.2075546
Show Author Affiliations
Chun-Lin Chang, National Taiwan Univ. (Taiwan)
Yen-Yin Li, National Taiwan Univ. (Taiwan)
Po-Yen Lai, National Central Univ. (Taiwan)
Yi-Ping Lai, National Taiwan Univ. (Taiwan)
Chien-Wei Huang, National Taiwan Univ. (Taiwan)
Shih-Hung Chen, National Central Univ. (Taiwan)
Sheng-Lung L. Huang, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9344:
Fiber Lasers XII: Technology, Systems, and Applications
L. Brandon Shaw, Editor(s)

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