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Proceedings Paper

Robust diffuser and roughness metrology tool for LED manufacturing
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Paper Abstract

We have built a novel oblique angle scatterometer designed and optimized for measurements of rough surfaces having a root mean square roughness value (RMS Roughness) on the order of 100 nm – 1000 nm or larger. The majority of existing techniques for measurement of such surfaces are slow, sensitive to vibration, provide short or no working distance, may result in generation of particles and have very small throughput.1 In this paper, we novel metrology addressing the above limitations.

Paper Details

Date Published: 9 March 2015
PDF: 7 pages
Proc. SPIE 9383, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX, 93830W (9 March 2015); doi: 10.1117/12.2075540
Show Author Affiliations
Wojtech J. Walecki, Sunrise Optical LLC (United States)
Peter Walecki, Sunrise Optical LLC (United States)


Published in SPIE Proceedings Vol. 9383:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Martin Strassburg, Editor(s)

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