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Proceedings Paper

Research on detection technology of microstructure of optical surface based on total integrated scattering method
Author(s): Chunyang Wang; Qiang Wang; Guoxu Ding; Liang Zhao
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Paper Abstract

This paper proposes that surface roughness of optical element is detected using total integrated scattering method, Meanwhile, establishing the relational model between surface roughness and subsurface damage to get the depth of subsurface damage rapidly and accurately after we measured surface roughness so as to achieve the goal of detection of optical element’s surface microstructure.

Paper Details

Date Published: 19 February 2015
PDF: 10 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493J (19 February 2015); doi: 10.1117/12.2075329
Show Author Affiliations
Chunyang Wang, Changchun Univ. of Science and Technology (China)
Qiang Wang, Changchun Univ. of Science and Technology (China)
Guoxu Ding, Changchun Univ. of Science and Technology (China)
Liang Zhao, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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