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Proceedings Paper

Research on vacuum utraviolet calibration technology
Author(s): Jiapeng Wang; Shumin Gao; Hongsheng Sun; Yinghang Chen; Jianqiang Wei
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Paper Abstract

Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultraviolet payloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUV and FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUV wavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical model and value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200 nm is presented in this paper. The calibration device plays an important role in national space research.

Paper Details

Date Published: 18 November 2014
PDF: 8 pages
Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92980Z (18 November 2014); doi: 10.1117/12.2075287
Show Author Affiliations
Jiapeng Wang, Beijing Zhenxing Institute of Metrology and Measurement (China)
Shumin Gao, Beijing Zhenxing Institute of Metrology and Measurement (China)
Hongsheng Sun, Beijing Zhenxing Institute of Metrology and Measurement (China)
Yinghang Chen, Beijing Zhenxing Institute of Metrology and Measurement (China)
Jianqiang Wei, Beijing Zhenxing Institute of Metrology and Measurement (China)


Published in SPIE Proceedings Vol. 9298:
International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics
Jannick P. Rolland; Changxiang Yan; Dae Wook Kim; Wenli Ma; Ligong Zheng, Editor(s)

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