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Proceedings Paper

L2 laser repair system: high-throughput repair of 800 x 800 mm flat panel substrates
Author(s): J. David Casey Jr.; Mark DiManna; R. W. DiNuccio; N. J. Guarino; Russell Mello; Alex F. Pless; G. Onorio; S. Shenoy; David A. Townzen; Don E. Yansen
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Paper Abstract

Inspection and repair offer higher yields and lower costs for AMLCDs, plasma displays and field emission displays, especially as display size increases. For repair to contribute, it must be fast and fully reliable. Building on L1 technology, a second generation L2 laser repair tool utilizes laser cutting and laser deposition technologies to repair electrical open and short defects on the active plates and on the passive color filter plates. This paper details engineering modifications which significantly reduce the time to repair a panel while maintaining repair reliability. Moreover, the L2 can receive up to 800 X 800 mm substrates of varied thickness.

Paper Details

Date Published: 24 April 1995
PDF: 11 pages
Proc. SPIE 2408, Liquid Crystal Materials, Devices, and Displays, (24 April 1995); doi: 10.1117/12.207517
Show Author Affiliations
J. David Casey Jr., Micrion Corp. (United States)
Mark DiManna, Micrion Corp. (United States)
R. W. DiNuccio, Micrion Corp. (United States)
N. J. Guarino, Micrion Corp. (United States)
Russell Mello, Micrion Corp. (United States)
Alex F. Pless, Micrion Corp. (United States)
G. Onorio, Micrion Corp. (United States)
S. Shenoy, Micrion Corp. (United States)
David A. Townzen, Micrion Corp. (United States)
Don E. Yansen, Micrion Corp. (United States)


Published in SPIE Proceedings Vol. 2408:
Liquid Crystal Materials, Devices, and Displays
Ranganathan Shashidhar; Uzi Efron, Editor(s)

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