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Proceedings Paper

Cost-effective projection lithography for thin film displays
Author(s): Ronald E. Sheets; Heinrich G. Mueller
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Paper Abstract

A new type of high definition large area photolithography system, based on scanning projection lithography, has been developed and successfully implemented as a tool for flat panel display manufacturing. The machines built on this principle have a resolution of better than 4 micrometers and can expose areas of 500 mm X 600 mm (20' X 24'). Comparison of the complexities of the ways and means to obtain these specifications leads to the conclusion that this equipment is highly cost effective. To support this claim, results of a cost of ownership model are presented.

Paper Details

Date Published: 24 April 1995
PDF: 6 pages
Proc. SPIE 2408, Liquid Crystal Materials, Devices, and Displays, (24 April 1995); doi: 10.1117/12.207516
Show Author Affiliations
Ronald E. Sheets, Tamarack Scientific, Inc. (United States)
Heinrich G. Mueller, Tamarack Scientific, Inc. (United States)


Published in SPIE Proceedings Vol. 2408:
Liquid Crystal Materials, Devices, and Displays
Ranganathan Shashidhar; Uzi Efron, Editor(s)

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