Share Email Print
cover

Proceedings Paper

Effect of the angle accuracy in reduced-phase dual-illumination interferometer
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Reduced-phase dual-illumination interferometer (RPDII) is an off axis, single shot and single wavelength phase imaging technique to measure large objects without using unwrapping algorithms. Two beams of this interferometer illuminate a sample at different incident angles, two phases of the different incident angles and their phase difference are recorded. The phase difference between two beams can be controlled by adjusting the incident angles. The angle accuracy that decrease the RPDII accuracy have been studied. We have shown, the groove spacing of the grating and magnification of the lens system before sample, determine the incident angle accuracy. The ability of RPDII to unwrap large phases is shown by reconstructing phase of a step object without using unwrapping algorithms. The reconstructed image shows that the total inaccuracy is much more than the inaccuracy caused by incident angles.

Paper Details

Date Published: 11 November 2014
PDF: 6 pages
Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 92711V (11 November 2014); doi: 10.1117/12.2074457
Show Author Affiliations
Behnam Tayebi, Yonsei Univ. (Korea, Republic of)
Mohammad Reza Jafarfard, Yonsei Univ. (Korea, Republic of)
Farnaz Sharif, Yonsei Univ. (Korea, Republic of)
Dug Young Kim, Yonsei Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 9271:
Holography, Diffractive Optics, and Applications VI
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

© SPIE. Terms of Use
Back to Top