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Proceedings Paper

Substrate-blind photonic integration based on high-index glass materials
Author(s): Hongtao Lin; Lan Li; Yi Zou; Qingyang Du; Okechukwu Ogbuu; Charmayne Smith; Erick Koontz; David Musgraves; Kathleen Richardson; Juejun Hu
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Paper Abstract

Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures (< 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.

Paper Details

Date Published: 13 November 2014
PDF: 8 pages
Proc. SPIE 9277, Nanophotonics and Micro/Nano Optics II, 92770T (13 November 2014); doi: 10.1117/12.2073972
Show Author Affiliations
Hongtao Lin, Univ. of Delaware (United States)
Lan Li, Univ. of Delaware (United States)
Yi Zou, Univ. of Delaware (United States)
Qingyang Du, Massachusetts Institute of Technology (United States)
Okechukwu Ogbuu, Univ. of Delaware (United States)
Charmayne Smith, College of Optics & Photonics, Univ. of Central Florida (United States)
Erick Koontz, College of Optics & Photonics, Univ. of Central Florida (United States)
David Musgraves, IRradiance Glass Inc. (United States)
Kathleen Richardson, College of Optics & Photonics, Univ. of Central Florida (United States)
Juejun Hu, Univ. of Delaware (United States)
Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 9277:
Nanophotonics and Micro/Nano Optics II
Zhiping Zhou; Kazumi Wada, Editor(s)

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