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Proceedings Paper

Fabrication of broadband antireflection coating at terahertz frequency using a hot emboss method
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Paper Abstract

We fabricated a terahertz anti-reflective structure on a polystylene by using a hot-embossing method. Polystylene was spin-coated onto a silicon substrate and then transformed by using a metallic mould comprising a bunch of Chinese acupuncture needles. The transformation layer yielded gradient refractive index profiles on the substrate which can reduce the surface reflection effectively. The samples were evaluated by a terahertz time-domain spectroscope. Compared with a bare silicon substrate, we observed an increase of ~30% in the transmittance. We also observed broader bandwidth properties compared with a single-layer antireflective structure. The process imposes no substrate limiting; i.e., it has great potential to be applied onto various THz devices.

Paper Details

Date Published: 11 November 2014
PDF: 6 pages
Proc. SPIE 9275, Infrared, Millimeter-Wave, and Terahertz Technologies III, 92750K (11 November 2014); doi: 10.1117/12.2073965
Show Author Affiliations
YunZhou Li, Univ. of Shanghai for Science and Technology (China)
Bin Cai, Univ. of Shanghai for Science and Technology (China)
YiMing Zhu, Univ. of Shanghai for Science and Technology (China)


Published in SPIE Proceedings Vol. 9275:
Infrared, Millimeter-Wave, and Terahertz Technologies III
Cunlin Zhang; Xi-Cheng Zhang; Masahiko Tani, Editor(s)

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