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Proceedings Paper

Research of scratch visibility in (subsurface) damage detection based on total internal reflection microscopy
Author(s): Hui Cui; Shijie Liu; Yuanan Zhao; Jie Liu; Jun He
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Paper Abstract

Damages on or near polished substates can be easily observed by TIRM(Total Internal Reflection Microscopy). In our experiments we found that there was a strong dependence of scratch visibility on the angle(φ) between scratches and normal direction of the incident plane. In this paper, the scattered field distribution of a scratch and the imaging properties of a microscope are analyzed. We believe that it is the anisotropy of illumination in TIR-illumination mode that causes the visibility changes of a scratch. After taking this directionality into consideration, we propose an experimental method for TIRM to take picutures with all scratches in all directions in one image.

Paper Details

Date Published: 22 September 2014
PDF: 4 pages
Proc. SPIE 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers, 92380H (22 September 2014); doi: 10.1117/12.2073535
Show Author Affiliations
Hui Cui, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Jie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Jun He, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9238:
Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers
Takahisa Jitsuno; Jianda Shao; Wolfgang Rudolph, Editor(s)

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