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Proceedings Paper

The figure simulation of the polishing pad in the continuous polishing process
Author(s): Haiyang Shan; Xueke Xu; Hongbo He; Shijie Liu; Chaoyang Wei; Kui Yi; Jianda Shao
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Paper Abstract

The figures of the polishing pad are of great significance for the figures of optical workpieces in the continuous polishing process. Three main factors which affect the figures of the pad, including the polishing pad creep deformation, the calibration plate grinding and the ambient change in temperature, are analyzed in this work. Processing parameters including the eccentricity between the polishing pad and the calibration plate, the calibration plate thickness, angular velocities of the pad are introduced in this analytic process. With this method, the figures of the polishing pad in the continuous polishing can be obtained. This work provides theoretical guidance for the deterministic processing of the continuous polishing process.

Paper Details

Date Published: 22 September 2014
PDF: 5 pages
Proc. SPIE 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers, 92380G (22 September 2014); doi: 10.1117/12.2073492
Show Author Affiliations
Haiyang Shan, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Chaoyang Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 9238:
Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers
Takahisa Jitsuno; Jianda Shao; Wolfgang Rudolph, Editor(s)

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