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Proceedings Paper

Electrowetting-based adaptive vari-focal liquid lens array for 3D display
Author(s): Yong Hyub Won
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Paper Abstract

Electrowetting is a phenomenon that can control the surface tension of liquid when a voltage is applied. This paper introduces the fabrication method of liquid lens array by the electrowetting phenomenon. The fabricated 23 by 23 lens array has 1mm diameter size with 1.6 mm interval distance between adjacent lenses. The diopter of each lens was - 24~27 operated at 0V to 50V. The lens array chamber fabricated by Deep Reactive-Ion Etching (DRIE) is deposited with IZO and parylene C and tantalum oxide. To prevent water penetration and achieve high dielectric constant, parylene C and tantalum oxide (ε = 23 ~ 25) are used respectively. Hydrophobic surface which enables the range of contact angle from 60 to 160 degree is coated to maximize the effect of electrowetting causing wide band of dioptric power. Liquid is injected into each lens chamber by two different ways. First way was self water-oil dosing that uses cosolvent and diffusion effect, while the second way was micro-syringe by the hydrophobic surface properties. To complete the whole process of the lens array fabrication, underwater sealing was performed using UV adhesive that does not dissolve in water. The transient time for changing from concave to convex lens was measured <33ms (at frequency of 1kHz AC voltage.). The liquid lens array was tested unprecedentedly for integral imaging to achieve more advanced depth information of 3D image.

Paper Details

Date Published: 24 October 2014
PDF: 6 pages
Proc. SPIE 9270, Optoelectronic Devices and Integration V, 92700W (24 October 2014); doi: 10.1117/12.2073397
Show Author Affiliations
Yong Hyub Won, Korea Advanced Institute of Science and Technology (Korea, Republic of)

Published in SPIE Proceedings Vol. 9270:
Optoelectronic Devices and Integration V
Xuping Zhang; Hai Ming; Changyuan Yu, Editor(s)

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