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Proceedings Paper

A sampling method to measure surface roughness of circular flat
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Paper Abstract

We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat.

Paper Details

Date Published: 18 September 2014
PDF: 7 pages
Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820J (18 September 2014); doi: 10.1117/12.2073329
Show Author Affiliations
Kai Meng, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Lijun Shen, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Weihong Song, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9282:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Wei Gao, Editor(s)

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