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Proceedings Paper

Influence factors of optical surface roughness in traditional polishing process
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Paper Abstract

Reducing the optical surface roughness is the key to improve the polishing quality of optical mirrors. Traditional polishing technology in ultra-smooth polishing glass has been used widely for a long time. In this paper, the theories of traditional polishing in polishing process were summarized. The problems in polishing procedure were analyzed and the influence factors of optical surface roughness were provided according to the polishing procedure of optical mirrors, and the relative measurements were pointed out. During the factors, polishing slurry and polishing pad are the important ones. Contrasting with former traditional polishing technology, roughness factors of new polishing slurry and polishing pad were analyzed and used in polishing process. The optical mirror of Ø246mm was polished in traditional technology with new polishing slurry and polishing pad, the obtained testing results were surface roughness 3.421nm before polishing and 0.613nm after polishing.

Paper Details

Date Published: 6 August 2014
PDF: 8 pages
Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92811Y (6 August 2014); doi: 10.1117/12.2073259
Show Author Affiliations
Li-Jun Shen, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yong-Jian Wan, Institute of Optics and Electronics (China)
Kai Meng, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9281:
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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