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Proceedings Paper

In-situ and real time stress of 30.4-nmMo/Si multilayer mirror for the moon-based EUV camera
Author(s): Yun-peng Li; Bo Chen; Fei He; Hua-bin Yang; Xiao-duo Wang; Xin Zheng; Xiao-dong Wang; Hong-ji Zhang; Hai-feng Wang; Jian-lin Cao
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Paper Abstract

Applications of Mo/Si multilayer mirrors for the moon-based extreme ultraviolet Camera (EUVC) require not only the minimal residual stress, but also little stress changes in the temperature environment on lunar surface. Hence, we deposit the 16.5 nm period Mo/Si multilayer mirror with a low as-deposited residual stress of -36 Mpa (compressive). The in-situ and real time stress tests are measured in the temperature cycling range from 20 °C to 130 °C. The results indicate that the stress gradually increases to the maximum of -100 MPa when heating up to 105 °C, then it gradually relaxes to 10 Mpa after thermal cycling to 130 °C. Such stress change has little influence on the performance of the Mo/Si multilayer mirror.

Paper Details

Date Published: 18 December 2014
PDF: 5 pages
Proc. SPIE 9295, International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, 929509 (18 December 2014); doi: 10.1117/12.2073023
Show Author Affiliations
Yun-peng Li, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Bo Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Fei He, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hua-bin Yang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Xiao-duo Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Xin Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xiao-dong Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hong-ji Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hai-feng Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jian-lin Cao, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9295:
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies
Guofan Jin; Songlin Zhuang; Jennifer Liu, Editor(s)

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