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Proceedings Paper

Infrared transparent conductive films
Author(s): Fei Tao; Wei-guo Sun; Liang Zhang; Li-wen Wang; Lei Zhang; Xu-bo Zhu
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Paper Abstract

This paper presents results for films of CuAlxOy were deposited on the sapphire by reactive magnetron co-sputtering using DC applied to the high-purity Cu target,RF applied to the high-purity Al target.Copper aluminum oxide film (CuAlxOy) is transparent for infrared and conductive. The properties of the films are influenced by the power of sputtering,the thickness of films etc. deposition parameters. It has been found that, by fine-tuning the sputtering parameters, the films with both reasonably low resistance and high transmission can be obtained simultaneously.The relationship between the process parameters and the properties of the films were established, the process parameters is very important for preparation of the films later.The relationship between the average transmittance, electrical conductivity and thickness of the films etc. parameters were set up.

Paper Details

Date Published: 18 December 2014
PDF: 6 pages
Proc. SPIE 9295, International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, 929508 (18 December 2014); doi: 10.1117/12.2072889
Show Author Affiliations
Fei Tao, Luoyang Optoelectro Technology Development Ctr. (China)
Wei-guo Sun, Luoyang Optoelectro Technology Development Ctr. (China)
Liang Zhang, Luoyang Optoelectro Technology Development Ctr. (China)
Li-wen Wang, Luoyang Optoelectro Technology Development Ctr. (China)
Lei Zhang, Luoyang Optoelectro Technology Development Ctr. (China)
Xu-bo Zhu, Luoyang Optoelectro Technology Development Ctr. (China)


Published in SPIE Proceedings Vol. 9295:
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies
Guofan Jin; Songlin Zhuang; Jennifer Liu, Editor(s)

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