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Proceedings Paper

Principal and error analysis of mirror symmetry method in three-flat test
Author(s): Yong Liu; Xu Liu; Hongzhen Jiang; Yuhang He; Huan Ren; Yi Yang; Lin Zhang; Zhendong Shi; Quan Yuan
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Paper Abstract

Three-flat test can separate the reference surface error from the test part surface in the surface measurement by interferometry. The solution based on mirror symmetry of three-flat test is compact and highly accurate. In practice, the error will be introduced when the position of three flats are misalignment or the relative rotation angle are not accurate. The influence of rotation angle error are simulated and discussed. Then the experiment was carried out on three reference flats and the flat surface profiles were derived by mirror symmetry method. The experiment results show good agreement and the difference is in a nanometer level.

Paper Details

Date Published: 3 December 2014
PDF: 5 pages
Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 929710 (3 December 2014); doi: 10.1117/12.2071921
Show Author Affiliations
Yong Liu, Research Ctr. of Laser Fusion, CAEP (China)
Xu Liu, Research Ctr. of Laser Fusion, CAEP (China)
Hongzhen Jiang, Research Ctr. of Laser Fusion, CAEP (China)
Yuhang He, Research Ctr. of Laser Fusion, CAEP (China)
Huan Ren, Research Ctr. of Laser Fusion, CAEP (China)
Yi Yang, Research Ctr. of Laser Fusion, CAEP (China)
Lin Zhang, Research Ctr. of Laser Fusion, CAEP (China)
Zhendong Shi, Research Ctr. of Laser Fusion, CAEP (China)
Quan Yuan, Research Ctr. of Laser Fusion, CAEP (China)


Published in SPIE Proceedings Vol. 9297:
International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors
Jurgen Czarske; Shulian Zhang; David Sampson; Wei Wang; Yanbiao Liao, Editor(s)

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