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Proceedings Paper

Analyses of multiple surfaces transform interferometry in parallel plate measurement
Author(s): Lin Zhang; Huan Ren; Yi Yang; Yong Liu; Zhendong Shi; Quan Yuan; Hongzhen Jiang
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Paper Abstract

Multiple surfaces transform interferometery is a preferred technology for surface profile and index homogeneity measurement using a Fourier based analysis method combined with phase-shifting interferometer. As a four-surface cavity for example, the surface form and index inhomogeneity of the parallel plate are deduced by extracting the information from the corresponding interference frequency. The errors of surface form and index homogeneity are simultaneously simulated and analyzed with different sampling buckets. The results show the feasibility and high precision of this approach compared with traditional methods.

Paper Details

Date Published: 3 December 2014
PDF: 6 pages
Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92970Y (3 December 2014); doi: 10.1117/12.2071877
Show Author Affiliations
Lin Zhang, China Academy of Engineering Physics (China)
Huan Ren, China Academy of Engineering Physics (China)
Yi Yang, China Academy of Engineering Physics (China)
Yong Liu, China Academy of Engineering Physics (China)
Zhendong Shi, China Academy of Engineering Physics (China)
Quan Yuan, China Academy of Engineering Physics (China)
Hongzhen Jiang, China Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 9297:
International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors
Jurgen Czarske; Shulian Zhang; David Sampson; Wei Wang; Yanbiao Liao, Editor(s)

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