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Proceedings Paper

Dual-frequency laser displacement and angle interferometer
Author(s): Shijie Zhao; Haoyun Wei; Yan Li
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Paper Abstract

Traditional laser angular interferometers based on a Michelson Interferometer or its modifications have the same principle: changing the angle displacement to an optical path difference. However, measuring the angular error of stage travels is a dynamic process. The main trouble is lack of displacement information and need to be solved urgently. A obvious method is using two dual-frequency interferometers to get the displacement and angular. In this paper, a new kind of displacement and angle interferometer (DIAI) is introduced. In this DIAI, displacement and angular are measured simultaneously by special optical path. The DIAI consists of a stabilized orthogonal polarization dualfrequency laser, a monolithic prism and additional optical and electronic components. The dual-frequency laser is divided into reference light and measurement light by a beam-splitting prism. The measurement light spatially separated into horizontal polarized light and vertical polarized light by the polarization splitting prism. Changing by a fixed 45°- tilted reflector, the vertical polarized light is parallel to the horizontal polarized light. These parallel lights reflected by two corner cube retroreflectors at a moving target. Compared with the reference light, the displacement and angular are measured. Different from the traditional method, there is only one reference corner cube retroreflector in this system. Thus, the angular measurement accuracy is better. The accuracy of the DIAI is better than ±0.25 arcsec in comparison with an autocollimator.

Paper Details

Date Published: 13 November 2014
PDF: 6 pages
Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 92761T (13 November 2014); doi: 10.1117/12.2071869
Show Author Affiliations
Shijie Zhao, Tsinghua Univ. (China)
Haoyun Wei, Tsinghua Univ. (China)
Yan Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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