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Proceedings Paper

Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses
Author(s): Xueliang Yan; Jie Hu; Xiaowei Li; Bo Xia; Pengjun Liu; Yongfeng Lu; Lan Jiang
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Paper Abstract

With ultrashort pulse durations and ultrahigh power densities, femtosecond laser presents unique advantages of high precision and high quality fabrication of microchannels in transparent materials. In our study, by shaping femtosecond laser pulse energy distribution in temporal or spatial domains, localized transient electrons dynamics and the subsequent processes, such as phase changes, can be controlled, leading to the dramatic increases in the capability of femtosecond laser microchannels fabrication. The temporally shaped femtosecond laser pulse trains can significantly enhance the material removal rate in both water-assisted femtosecond laser drilling and femtosecond laser irradiation followed by chemical etching. Besides, high-aspect-ratio and small-diameter microchannels are drilled by spatially shaped femtosecond laser pulses.

Paper Details

Date Published: 18 November 2014
PDF: 8 pages
Proc. SPIE 9266, High-Power Lasers and Applications VII, 92660T (18 November 2014); doi: 10.1117/12.2071591
Show Author Affiliations
Xueliang Yan, Beijing Institute of Technology (China)
Jie Hu, Beijing Institute of Technology (China)
Xiaowei Li, Beijing Institute of Technology (China)
Bo Xia, Beijing Institute of Technology (China)
Pengjun Liu, Beijing Institute of Technology (China)
Yongfeng Lu, Univ. of Nebraska-Lincoln (United States)
Lan Jiang, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 9266:
High-Power Lasers and Applications VII
Ruxin Li; Upendra N. Singh; Robert F. Walter, Editor(s)

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