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Proceedings Paper

Nano-scale finishing of off-axis aspheric mirror by ion beam figuring
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Paper Abstract

The high precision off-axis asphere mirrors are quite usefull in the modern sapce optical system.in this paper, the ion beam figuring is researched to accomplish the final surface accuracy. Firstly, The IBF machine we used is introduced simplely. The correction method for the distortion in off-axis mirror interference measurement is studied. Beacasue of the curve shape of the off-axis mirror, the changing of the removal function was analyzed simply. In order to testify the reaserch, a 1100mm×800mm off-axis aspheric mirror is finished by ion beam figuring. After 2 times polishing, the surface error was corrected to RMS 9nm in full aperture and achieved 6.3nm in sub- aperture.

Paper Details

Date Published: 18 November 2014
PDF: 6 pages
Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981C (18 November 2014); doi: 10.1117/12.2071418
Show Author Affiliations
Wei-Jie Deng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Li-gong Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 9298:
International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics
Jannick P. Rolland; Changxiang Yan; Dae Wook Kim; Wenli Ma; Ligong Zheng, Editor(s)

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