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Proceedings Paper

Femtosecond laser induced surface structuring on silicon by diffraction-assisted micropatterning
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Paper Abstract

Femtosecond laser micropatterning of silicon with nanometric surface modulation is demonstrated by irradiating through a diffracting pinhole. The irradiation results obtained at fluences above the melting threshold are characterized by optical and scanning electron microscopy and reveal a good agreement with Fresnel diffraction theory. LIPSS have been generated in the micropatterning surface. We found Ripples spacing were found of 550-680 nm. Based on the Sipe and Drude model, the theoretical period of LIPSS is closer to experimental measurements. Due to the diffraction, the LIPPS having a different period appear in a diffraction micropatterning.

Paper Details

Date Published: 3 February 2015
PDF: 6 pages
Proc. SPIE 9255, XX International Symposium on High-Power Laser Systems and Applications 2014, 925540 (3 February 2015); doi: 10.1117/12.2071378
Show Author Affiliations
Shutong Wang, Sichuan Univ. (China)
Guoying Feng, Sichuan Univ. (China)

Published in SPIE Proceedings Vol. 9255:
XX International Symposium on High-Power Laser Systems and Applications 2014
Chun Tang; Shu Chen; Xiaolin Tang, Editor(s)

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