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Proceedings Paper

A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing
Author(s): Jiaqing Mo; Yajun Liu; Changwu Lv; Xiaoyi Lv; Zhenhong Jia
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Paper Abstract

Porous silicon material and device has attracted more attention for use as biochemical optical sensors. In this paper, A novel porous silicon-based multilayer dielectric-grating structures by adding high-reflectivity porous silicon stacks between the substrate and grating was fabricated, and the porous silicon grating height was set to be about 200 nm, the grating period was 4 μm, the air filling factor was 50%. A new better method of preparing this porous silicon-based multilayer dielectric-grating structures have also been employed.

Paper Details

Date Published: 11 November 2014
PDF: 6 pages
Proc. SPIE 9274, Advanced Sensor Systems and Applications VI, 927419 (11 November 2014); doi: 10.1117/12.2071350
Show Author Affiliations
Jiaqing Mo, Xi'an Jiaotong Univ. (China)
Yajun Liu, Xinjiang Univ. (China)
Changwu Lv, Xinjiang Univ. (China)
Xiaoyi Lv, Xinjiang Univ. (China)
Zhenhong Jia, Xinjiang Univ. (China)


Published in SPIE Proceedings Vol. 9274:
Advanced Sensor Systems and Applications VI
Tiegen Liu; Shibin Jiang; Niels Neumann, Editor(s)

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