Share Email Print
cover

Proceedings Paper

High divergent 2D grating
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A 3×3 high divergent 2D-grating with period of 3.842μm at wavelength of 850nm under normal incidence is designed and fabricated in this paper. This high divergent 2D-grating is designed by the vector theory. The Rigorous Coupled Wave Analysis (RCWA) in association with the simulated annealing (SA) is adopted to calculate and optimize this 2D-grating.The properties of this grating are also investigated by the RCWA. The diffraction angles are more than 10 degrees in the whole wavelength band, which are bigger than the traditional 2D-grating. In addition, the small period of grating increases the difficulties of fabrication. So we fabricate the 2D-gratings by direct laser writing (DLW) instead of traditional manufacturing method. Then the method of ICP etching is used to obtain the high divergent 2D-grating.

Paper Details

Date Published: 11 November 2014
PDF: 6 pages
Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 92711E (11 November 2014); doi: 10.1117/12.2071324
Show Author Affiliations
Jin Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Jianyong Ma, Shanghai Institute of Optics and Fine Mechanics (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 9271:
Holography, Diffractive Optics, and Applications VI
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

© SPIE. Terms of Use
Back to Top