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Proceedings Paper

Analysis and comparison of angle measurement error compensation methods
Author(s): Dabao Lao; Weihu Zhou; dong shi
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Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927606; doi: 10.1117/12.2071197
Show Author Affiliations
Dabao Lao, Academy of Opto-Electronics (China)
Weihu Zhou, Academy of Opto-Electronics (China)
dong shi, Academy of Opto-Electronics (China)


Published in SPIE Proceedings Vol. 9276:
Optical Metrology and Inspection for Industrial Applications III
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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